Investigation of the plasma composition of a discharge with a self-heating hollow cathode and an active anode in a gas mixture with titanium and hexamethyldisilazane vapors

Abstract The analysis of composition low-pressure (~0.1-1 mTorr) hollow cathode arc plasma in Ar+N2 gas mixture with Ti+hexamethyldisilazane vapors was carried out by optical emission spectroscopy. influence HMDS flow rate (1-10 g/h), discharge current (10-50 A) and Ti-vapors on hexamethyldisilazane decomposition degree investigated. proposed activation method provides both an intense a high metal vapors, sufficient precursor for the formation solid TiSiCN coatings at deposition rate. Test thickness 6 microns hardness 31 GPa were obtained 1 hour 400ºC.